Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476113 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryota Kataoka, Kiyohisa ISHIBASHI | 2022-10-18 |
| 11365482 | Substrate processing apparatus and method of manufacturing semiconductor device | Mikio Ohno, Atsushi UMEKAWA, Takeo Hanashima | 2022-06-21 |
| 11261528 | Substrate processing apparatus and method of manufacturing semiconductor device | Shuhei Saido, Takuro USHIDA | 2022-03-01 |