Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387097 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Hiroto Yamagishi | 2022-07-12 |
| 11365482 | Substrate processing apparatus and method of manufacturing semiconductor device | Mikio Ohno, Atsushi UMEKAWA, Hiroaki Hiramatsu | 2022-06-21 |