Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11365482 | Substrate processing apparatus and method of manufacturing semiconductor device | Mikio Ohno, Takeo Hanashima, Hiroaki Hiramatsu | 2022-06-21 |
| 11300456 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tetsuya Kosugi, Tokunobu Akao, Motoya Takewaki | 2022-04-12 |