Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D973520 | Temperature sensor | — | 2022-12-27 |
| 11300456 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tetsuya Kosugi, Atsushi UMEKAWA, Motoya Takewaki | 2022-04-12 |