Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D962183 | Retainer plate of top heater for wafer processing furnace | Shinobu Sugiura, Takatomo Yamaguchi | 2022-08-30 |
| D962184 | Retainer plate of top heater for wafer processing furnace | Shinobu Sugiura, Takatomo Yamaguchi | 2022-08-30 |
| D959393 | Ceiling heater for substrate processing apparatus | Shinobu Sugiura, Yuya YOSHIMURA, Takuto Shoji | 2022-08-02 |
| 11300456 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tokunobu Akao, Atsushi UMEKAWA, Motoya Takewaki | 2022-04-12 |