Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495477 | Substrate processing apparatus | Shuhei Saido, Hidenari Yoshida, Takayuki Nakada, Tomoshi Taniyama | 2022-11-08 |
| D962183 | Retainer plate of top heater for wafer processing furnace | Shinobu Sugiura, Tetsuya Kosugi | 2022-08-30 |
| D962184 | Retainer plate of top heater for wafer processing furnace | Shinobu Sugiura, Tetsuya Kosugi | 2022-08-30 |
| 11359285 | Substrate processing apparatus, heater and method of manufacturing semiconductor device | Hitoshi Murata, Takashi Yahata, Yuichi Wada, Shuhei Saido | 2022-06-14 |
| 11222796 | Substrate processing apparatus | Shuhei Saido, Hidenari Yoshida, Takayuki Nakada, Tomoshi Taniyama | 2022-01-11 |