Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495477 | Substrate processing apparatus | Shuhei Saido, Takatomo Yamaguchi, Takayuki Nakada, Tomoshi Taniyama | 2022-11-08 |
| 11453942 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidetoshi Mimura, Takafumi Sasaki, Yusaku OKAJIMA | 2022-09-27 |
| 11222796 | Substrate processing apparatus | Shuhei Saido, Takatomo Yamaguchi, Takayuki Nakada, Tomoshi Taniyama | 2022-01-11 |