Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11453942 | Substrate processing apparatus and method of manufacturing semiconductor device | Takafumi Sasaki, Hidenari Yoshida, Yusaku OKAJIMA | 2022-09-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11453942 | Substrate processing apparatus and method of manufacturing semiconductor device | Takafumi Sasaki, Hidenari Yoshida, Yusaku OKAJIMA | 2022-09-27 |