Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11512392 | Substrate processing apparatus | Takayuki Nakada, Takashi Nogami, Daigi KAMIMURA | 2022-11-29 |
| 11495477 | Substrate processing apparatus | Shuhei Saido, Hidenari Yoshida, Takatomo Yamaguchi, Takayuki Nakada | 2022-11-08 |
| 11456190 | Substrate processing apparatus and method of manufacturing semiconductor device | Daigi KAMIMURA, Takashi Nogami | 2022-09-27 |
| 11450536 | Substrate processing apparatus and method of manufacturing semiconductor device | Daigi KAMIMURA, Kenji Shirako, Hironori Shimada, Akira HORII, Takayuki Nakada +1 more | 2022-09-20 |
| 11396700 | Substrate processing apparatus | Sadao Hisakado | 2022-07-26 |
| 11222796 | Substrate processing apparatus | Shuhei Saido, Hidenari Yoshida, Takatomo Yamaguchi, Takayuki Nakada | 2022-01-11 |