Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11512392 | Substrate processing apparatus | Takayuki Nakada, Takashi Nogami, Tomoshi Taniyama | 2022-11-29 |
| 11456190 | Substrate processing apparatus and method of manufacturing semiconductor device | Tomoshi Taniyama, Takashi Nogami | 2022-09-27 |
| 11450536 | Substrate processing apparatus and method of manufacturing semiconductor device | Tomoshi Taniyama, Kenji Shirako, Hironori Shimada, Akira HORII, Takayuki Nakada +1 more | 2022-09-20 |