Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450536 | Substrate processing apparatus and method of manufacturing semiconductor device | Daigi KAMIMURA, Tomoshi Taniyama, Hironori Shimada, Akira HORII, Takayuki Nakada +1 more | 2022-09-20 |