Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11512392 | Substrate processing apparatus | Takashi Nogami, Tomoshi Taniyama, Daigi KAMIMURA | 2022-11-29 |
| 11495477 | Substrate processing apparatus | Shuhei Saido, Hidenari Yoshida, Takatomo Yamaguchi, Tomoshi Taniyama | 2022-11-08 |
| 11450536 | Substrate processing apparatus and method of manufacturing semiconductor device | Daigi KAMIMURA, Tomoshi Taniyama, Kenji Shirako, Hironori Shimada, Akira HORII +1 more | 2022-09-20 |
| 11222796 | Substrate processing apparatus | Shuhei Saido, Hidenari Yoshida, Takatomo Yamaguchi, Tomoshi Taniyama | 2022-01-11 |