Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11512392 | Substrate processing apparatus | Takayuki Nakada, Tomoshi Taniyama, Daigi KAMIMURA | 2022-11-29 |
| 11456190 | Substrate processing apparatus and method of manufacturing semiconductor device | Daigi KAMIMURA, Tomoshi Taniyama | 2022-09-27 |