Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D962183 | Retainer plate of top heater for wafer processing furnace | Tetsuya Kosugi, Takatomo Yamaguchi | 2022-08-30 |
| D962184 | Retainer plate of top heater for wafer processing furnace | Tetsuya Kosugi, Takatomo Yamaguchi | 2022-08-30 |
| D959393 | Ceiling heater for substrate processing apparatus | Tetsuya Kosugi, Yuya YOSHIMURA, Takuto Shoji | 2022-08-02 |