Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D959393 | Ceiling heater for substrate processing apparatus | Shinobu Sugiura, Tetsuya Kosugi, Takuto Shoji | 2022-08-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D959393 | Ceiling heater for substrate processing apparatus | Shinobu Sugiura, Tetsuya Kosugi, Takuto Shoji | 2022-08-02 |