Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495435 | Substrate processing apparatus, non-transitory computer-readable recording medium, method of manufacturing semiconductor device, and a substrate processing method | Teruo Yoshino | 2022-11-08 |
| 11359285 | Substrate processing apparatus, heater and method of manufacturing semiconductor device | Hitoshi Murata, Yuichi Wada, Takatomo Yamaguchi, Shuhei Saido | 2022-06-14 |
| 11305986 | Method of manufacturing semiconductor device, substrate processing apparatus and program | Naofumi Ohashi, Tadashi Takasaki | 2022-04-19 |
| 11289350 | Method of manufacturing semiconductor device | Yukinori Aburatani, Tadashi Takasaki, Naofumi Ohashi, Shun MATSUI, Keita ICHIMURA | 2022-03-29 |
| 11264217 | Substrate processing apparatus | — | 2022-03-01 |