Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521848 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Naofumi Ohashi, Tetsuo Yamamoto | 2022-12-06 |
| 11424146 | Substrate processing apparatus and temperature measurement unit | Shin Hiyama | 2022-08-23 |
| 11289350 | Method of manufacturing semiconductor device | Takashi Yahata, Tadashi Takasaki, Naofumi Ohashi, Shun MATSUI, Keita ICHIMURA | 2022-03-29 |