Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11422528 | Substrate processing system, method of manufacturing semiconductor device, and recording medium | Yasuhiro MIZUGUCHI, Tadashi Takasaki, Naofumi Ohashi | 2022-08-23 |
| 11355372 | Method of manufacturing semiconductor device by setting process chamber to maintenance enable state | Yasuhiro MIZUGUCHI, Naofumi Ohashi, Tadashi Takasaki | 2022-06-07 |
| 11342212 | Method of manufacturing semiconductor device by setting process chamber maintenance enable state | Yasuhiro MIZUGUCHI, Naofumi Ohashi, Tadashi Takasaki | 2022-05-24 |
| 11343426 | Notifying apparatus, image capturing apparatus, notifying method, and storage medium for making a notification of motion blur | Hiroshi Suzuki | 2022-05-24 |
| 11314234 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Naofumi Ohashi, Toshiyuki Kikuchi, Tadashi Takasaki | 2022-04-26 |
| 11289350 | Method of manufacturing semiconductor device | Yukinori Aburatani, Takashi Yahata, Tadashi Takasaki, Naofumi Ohashi, Keita ICHIMURA | 2022-03-29 |