Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11422528 | Substrate processing system, method of manufacturing semiconductor device, and recording medium | Shun MATSUI, Tadashi Takasaki, Naofumi Ohashi | 2022-08-23 |
| 11355372 | Method of manufacturing semiconductor device by setting process chamber to maintenance enable state | Naofumi Ohashi, Tadashi Takasaki, Shun MATSUI | 2022-06-07 |
| 11342212 | Method of manufacturing semiconductor device by setting process chamber maintenance enable state | Naofumi Ohashi, Tadashi Takasaki, Shun MATSUI | 2022-05-24 |