Issued Patents 2022
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538661 | Substrate processing apparatus | Teruo Yoshino, Tadashi Takasaki | 2022-12-27 |
| 11530481 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Hidehiro Yanai, Tadashi Takasaki | 2022-12-20 |
| 11521848 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yukinori Aburatani, Tetsuo Yamamoto | 2022-12-06 |
| 11473196 | Substrate processing apparatus | Tetsuaki INADA | 2022-10-18 |
| 11422528 | Substrate processing system, method of manufacturing semiconductor device, and recording medium | Yasuhiro MIZUGUCHI, Shun MATSUI, Tadashi Takasaki | 2022-08-23 |
| 11380540 | Substrate processing apparatus | Takashi Nakagawa, Yoshiro Hirose, Tadashi Takasaki | 2022-07-05 |
| 11355372 | Method of manufacturing semiconductor device by setting process chamber to maintenance enable state | Yasuhiro MIZUGUCHI, Tadashi Takasaki, Shun MATSUI | 2022-06-07 |
| 11342212 | Method of manufacturing semiconductor device by setting process chamber maintenance enable state | Yasuhiro MIZUGUCHI, Tadashi Takasaki, Shun MATSUI | 2022-05-24 |
| 11322370 | Method of manufacturing semiconductor device | Hideharu Itatani, Toshiyuki Kikuchi | 2022-05-03 |
| 11314234 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Toshiyuki Kikuchi, Shun MATSUI, Tadashi Takasaki | 2022-04-26 |
| 11305986 | Method of manufacturing semiconductor device, substrate processing apparatus and program | Takashi Yahata, Tadashi Takasaki | 2022-04-19 |
| 11289350 | Method of manufacturing semiconductor device | Yukinori Aburatani, Takashi Yahata, Tadashi Takasaki, Shun MATSUI, Keita ICHIMURA | 2022-03-29 |