Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11499224 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Hideto Tateno | 2022-11-15 |
| 11473196 | Substrate processing apparatus | Naofumi Ohashi | 2022-10-18 |