Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538716 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Tomoya Matsui, Makoto Hirano | 2022-12-27 |
| 11499224 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Tetsuaki INADA | 2022-11-15 |
| 11476112 | Substrate processing apparatus | Akinori Tanaka, Sadayoshi Horii | 2022-10-18 |