Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11519815 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Shinji Yashima, Masahiro Miyake | 2022-12-06 |
| 11476112 | Substrate processing apparatus | Hideto Tateno, Sadayoshi Horii | 2022-10-18 |