Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538716 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Hideto Tateno, Makoto Hirano | 2022-12-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538716 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Hideto Tateno, Makoto Hirano | 2022-12-27 |