Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538661 | Substrate processing apparatus | Naofumi Ohashi, Tadashi Takasaki | 2022-12-27 |
| 11495435 | Substrate processing apparatus, non-transitory computer-readable recording medium, method of manufacturing semiconductor device, and a substrate processing method | Takashi Yahata | 2022-11-08 |
| 11384431 | Substrate processing apparatus | Masanori NAKAYAMA, Takeshi Yasui, Masaki Murobayashi | 2022-07-12 |
| 11271508 | Power conversion device, motor driving system, and control method | Naoto NIIMURA | 2022-03-08 |