Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11322370 | Method of manufacturing semiconductor device | Hideharu Itatani, Naofumi Ohashi | 2022-05-03 |
| 11314234 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Naofumi Ohashi, Shun MATSUI, Tadashi Takasaki | 2022-04-26 |