Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527402 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Yoshitomo HASHIMOTO, Katsuyoshi Harada, Kimihiko NAKATANI, Masaya NAGATO, Takashi Ozaki +1 more | 2022-12-13 |
| 11380540 | Substrate processing apparatus | Takashi Nakagawa, Naofumi Ohashi, Tadashi Takasaki | 2022-07-05 |
| 11251038 | Method of manufacturing semiconductor device, recording medium, and substrate processing method | Tsukasa Kamakura, Takaaki Noda | 2022-02-15 |
| 11251039 | Method of manufacturing semiconductor device, recording medium, and substrate processing method | Tsukasa Kamakura, Takaaki Noda | 2022-02-15 |