Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527402 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Yoshitomo HASHIMOTO, Katsuyoshi Harada, Yoshiro Hirose, Masaya NAGATO, Takashi Ozaki +1 more | 2022-12-13 |
| 11417518 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takayuki Waseda, Takashi Nakagawa, Motomu DEGAI, Yoshitomo HASHIMOTO | 2022-08-16 |
| 11335554 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takashi Nakagawa, Takayuki Waseda, Motomu DEGAI | 2022-05-17 |
| 11315800 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Motomu DEGAI, Takashi Nakagawa, Takayuki Waseda, Yoshitomo HASHIMOTO | 2022-04-26 |