Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11417518 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takayuki Waseda, Takashi Nakagawa, Kimihiko NAKATANI, Yoshitomo HASHIMOTO | 2022-08-16 |
| 11335554 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takashi Nakagawa, Takayuki Waseda, Kimihiko NAKATANI | 2022-05-17 |
| 11315800 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Takashi Nakagawa, Takayuki Waseda, Yoshitomo HASHIMOTO | 2022-04-26 |