Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527402 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Katsuyoshi Harada, Kimihiko NAKATANI, Yoshiro Hirose, Masaya NAGATO, Takashi Ozaki +1 more | 2022-12-13 |
| 11515143 | Method of manufacturing semiconductor device, substrate processing apparatus, recording medium, and method of processing substrate | Tatsuru Matsuoka | 2022-11-29 |
| 11417518 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takayuki Waseda, Takashi Nakagawa, Kimihiko NAKATANI, Motomu DEGAI | 2022-08-16 |
| 11315800 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Motomu DEGAI, Kimihiko NAKATANI, Takashi Nakagawa, Takayuki Waseda | 2022-04-26 |