Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11251038 | Method of manufacturing semiconductor device, recording medium, and substrate processing method | Takaaki Noda, Yoshiro Hirose | 2022-02-15 |
| 11251039 | Method of manufacturing semiconductor device, recording medium, and substrate processing method | Takaaki Noda, Yoshiro Hirose | 2022-02-15 |