Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11359285 | Substrate processing apparatus, heater and method of manufacturing semiconductor device | Takashi Yahata, Yuichi Wada, Takatomo Yamaguchi, Shuhei Saido | 2022-06-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11359285 | Substrate processing apparatus, heater and method of manufacturing semiconductor device | Takashi Yahata, Yuichi Wada, Takatomo Yamaguchi, Shuhei Saido | 2022-06-14 |