Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462401 | Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Kosuke Takagi, Naonori Akae, Masato Terasaki | 2022-10-04 |
| 11365482 | Substrate processing apparatus and method of manufacturing semiconductor device | Atsushi UMEKAWA, Takeo Hanashima, Hiroaki Hiramatsu | 2022-06-21 |