Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462401 | Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Kosuke Takagi, Masato Terasaki, Mikio Ohno | 2022-10-04 |
| 11377730 | Substrate processing apparatus and furnace opening cover | Kosuke Takagi, Shinya Morita, Keishin Yamazaki | 2022-07-05 |