Issued Patents 2022
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462401 | Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Naonori Akae, Masato Terasaki, Mikio Ohno | 2022-10-04 |
| 11450524 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Risa YAMAKOSHI, Takanori Ueno | 2022-09-20 |
| 11424473 | Fuel cell stack with support bar | Hideharu Naito, Satoshi Kasagami | 2022-08-23 |
| 11377730 | Substrate processing apparatus and furnace opening cover | Shinya Morita, Naonori Akae, Keishin Yamazaki | 2022-07-05 |
| 11359283 | Reaction tube structure and substrate processing apparatus | Tetsuya Marubayashi, Satoru Murata, Atsushi Hirano, Kiyoaki Yamada, Haruo Morikawa | 2022-06-14 |
| 11349143 | Fuel cell stack | Hideharu Naito | 2022-05-31 |
| 11316186 | Fuel cell system and fuel cell vehicle | Hideharu Naito | 2022-04-26 |
| 11299804 | Method of manufacturing semiconductor device, non-transitory computer-readable recording medium and substrate processing apparatus | Yuji Takebayashi, Atsushi Hirano, Ryuichi Nakagawa, Noriyuki Isobe | 2022-04-12 |