Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11359283 | Reaction tube structure and substrate processing apparatus | Tetsuya Marubayashi, Satoru Murata, Kosuke Takagi, Atsushi Hirano, Kiyoaki Yamada | 2022-06-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11359283 | Reaction tube structure and substrate processing apparatus | Tetsuya Marubayashi, Satoru Murata, Kosuke Takagi, Atsushi Hirano, Kiyoaki Yamada | 2022-06-14 |