Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11377730 | Substrate processing apparatus and furnace opening cover | Kosuke Takagi, Shinya Morita, Naonori Akae | 2022-07-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11377730 | Substrate processing apparatus and furnace opening cover | Kosuke Takagi, Shinya Morita, Naonori Akae | 2022-07-05 |