Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11299804 | Method of manufacturing semiconductor device, non-transitory computer-readable recording medium and substrate processing apparatus | Kosuke Takagi, Atsushi Hirano, Ryuichi Nakagawa, Noriyuki Isobe | 2022-04-12 |