Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476113 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryota Kataoka, Hiroaki Hiramatsu | 2022-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476113 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryota Kataoka, Hiroaki Hiramatsu | 2022-10-18 |