Issued Patents 2022
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11540432 | Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools | Gayatri Natu, Geetika Bajaj, Prerna Goradia, Darshan Thakare, David Fenwick +6 more | 2022-12-27 |
| 11446740 | Multiple sequential linear powder dispensers for additive manufacturing | Christopher A. Rowland, Anantha K. Subramani, Kasiraman Krishnan, Kartik Ramaswamy, Thomas Brezoczky +5 more | 2022-09-20 |
| 11424136 | Rare-earth oxide based coatings based on ion assisted deposition | Biraja P. Kanungo, Vahid Firouzdor, Ying Zhang | 2022-08-23 |
| 11401599 | Erosion resistant metal silicate coatings | Xiao-Ming He, Cheng-Hsuan Chou | 2022-08-02 |
| 11390947 | Method of forming a fluorinated metal film | Nitin Deepak, Suresh Chand Seth, Prerna Goradia, Geetika Bajaj, Darshan Thakare +1 more | 2022-07-19 |
| 11373882 | Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxide | Ren-Guan Duan, Jie Yuan, Li Xu, Kenneth S. Collins | 2022-06-28 |
| 11370078 | Chamber components with polished internal apertures | Vahid Firouzdor, David Koonce, Biraja P. Kanungo | 2022-06-28 |
| 11326253 | Atomic layer deposition of protective coatings for semiconductor process chamber components | David Fenwick | 2022-05-10 |
| 11279661 | Heat treated ceramic substrate having ceramic coating | Ren-Guan Duan, Biraja P. Kanungo, Dmitry Lubomirsky | 2022-03-22 |
| 11279656 | Nanopowders, nanoceramic materials and methods of making and use thereof | Guodong Zhan, Xiaowei Wu, Xiao-Ming He | 2022-03-22 |
| 11264261 | High temperature electrostatic chuck bonding adhesive | Senh Thach, Ren-Guan Duan | 2022-03-01 |
| 11251023 | Multi-layer plasma resistant coating by atomic layer deposition | Xiaowei Wu, David Fenwick, Guodong Zhan | 2022-02-15 |