Issued Patents 2022
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11493851 | Lithographic method and lithographic apparatus | Hakki Ergün Cekli, Xing Lan Liu, Stefan Cornelis Theodorus Van Der Sanden | 2022-11-08 |
| 11428521 | Metrology method, target and substrate | Kaustuve Bhattacharyya, Henricus Wilhelmus Maria Van Buel, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Maurits Van Der Schaar +7 more | 2022-08-30 |
| 11385550 | Methods and apparatus for obtaining diagnostic information relating to an industrial process | Alexander Ypma, Jasper Menger, David Deckers, David Han, Adrianus Cornelis Matheus Koopman +3 more | 2022-07-12 |
| 11320750 | Determining an optimal operational parameter setting of a metrology system | Leon Paul VAN DIJK, Victor Emanuel Calado, Xing Lan Liu | 2022-05-03 |
| 11300889 | Metrology apparatus | Leon Paul VAN DIJK, Subodh Singh, Ilya MALAKHOVSKY, Ronald Henricus Johannes OTTEN, Amandev Singh | 2022-04-12 |
| 11300887 | Method to change an etch parameter | Victor Emanuel Calado, Leon Paul VAN DIJK, Roy Werkman, Everhardus Cornelis Mos, Jochem Sebastiaan Wildenberg +4 more | 2022-04-12 |
| 11300888 | Methods of determining stress in a substrate, control system for controlling a lithographic process, lithographic apparatus and computer program product | Leon Paul VAN DIJK, Ilya MALAKHOVSKY, Ronald Henricus Johannes OTTEN | 2022-04-12 |
| 11294294 | Alignment mark positioning in a lithographic process | Leon Paul VAN DIJK, Orion Jonathan Pierre Mouraille, Anne Marie Pastol | 2022-04-05 |
| 11226567 | Methods and apparatus for use in a device manufacturing method | Leon Paul VAN DIJK, Ilya MALAKHOVSKY, Ronald Henricus Johannes OTTEN, Mahdi SADEGHINIA | 2022-01-18 |