Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11493851 | Lithographic method and lithographic apparatus | Hakki Ergün Cekli, Stefan Cornelis Theodorus Van Der Sanden, Richard Johannes Franciscus Van Haren | 2022-11-08 |
| 11428521 | Metrology method, target and substrate | Kaustuve Bhattacharyya, Henricus Wilhelmus Maria Van Buel, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Maurits Van Der Schaar +7 more | 2022-08-30 |
| 11347150 | Computational metrology | Wim Tjibbo Tel, Bart Peter Bert Segers, Everhardus Cornelis Mos, Emil Peter Schmitt-Weaver, Yichen Zhang +4 more | 2022-05-31 |
| 11320750 | Determining an optimal operational parameter setting of a metrology system | Leon Paul VAN DIJK, Victor Emanuel Calado, Richard Johannes Franciscus Van Haren | 2022-05-03 |