Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11422476 | Methods and apparatus for monitoring a lithographic manufacturing process | Kaustuve Bhattacharyya, Wim Tjibbo Tel, Frank Staals, Leon Martin Levasier | 2022-08-23 |
| 11347150 | Computational metrology | Wim Tjibbo Tel, Bart Peter Bert Segers, Everhardus Cornelis Mos, Yichen Zhang, Petrus Gerardus Van Rhee +4 more | 2022-05-31 |
| 11249404 | System and method for measurement of alignment | Kaustuve Bhattacharyya, Rene Marinus Gerardus Johan Queens, Wolfgang Henke, Wim Tjibbo Tel, Theodorus Franciscus Adrianus Maria Linschoten | 2022-02-15 |