Issued Patents 2022
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11520239 | Separation of contributions to metrology data | Wim Tjibbo Tel, Mark John Maslow, Roy ANUNCIADO, Marinus Jochemsen, Hugo Augustinus Joseph Cramer +2 more | 2022-12-06 |
| 11513442 | Method of determining control parameters of a device manufacturing process | Wim Tjibbo Tel, Mark John Maslow, Koenraad VAN INGEN SCHENAU, Patrick Warnaar, Abraham SLACHTER +3 more | 2022-11-29 |
| 11487209 | Method for controlling a lithographic apparatus and associated apparatuses | — | 2022-11-01 |
| 11480884 | Method for optimization of a lithographic process | Everhardus Cornelis Mos, Jochem Sebastiaan Wildenberg, Erik Johannes Maria Wallerbos, Maurits Van Der Schaar, Franciscus Hendricus Arnoldus Elich | 2022-10-25 |
| 11422476 | Methods and apparatus for monitoring a lithographic manufacturing process | Emil Peter Schmitt-Weaver, Kaustuve Bhattacharyya, Wim Tjibbo Tel, Leon Martin Levasier | 2022-08-23 |
| 11385554 | Metrology apparatus and method for determining a characteristic relating to one or more structures on a substrate | Miguel GARCIA GRANDA, Steven E. Steen, Eric Brouwer, Bart Peter Bert Segers, Pierre-Yves Guittet +1 more | 2022-07-12 |
| 11378891 | Method for determining contribution to a fingerprint | Davit Harutyunyan, Fei Jia, Fuming Wang, Hugo Thomas Looijestijn, Cornelis Johannes Rijnierse +8 more | 2022-07-05 |
| 11360395 | Control method for a scanning exposure apparatus | Valerio ALTINI | 2022-06-14 |
| 11314174 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Laurentius Cornelius De Winter, Roland Pieter Stolk, Anton Bernhard Van Oosten, Paul Christiaan Hinnen, Marinus Jochemsen +2 more | 2022-04-26 |