Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11385554 | Metrology apparatus and method for determining a characteristic relating to one or more structures on a substrate | Miguel GARCIA GRANDA, Steven E. Steen, Eric Brouwer, Bart Peter Bert Segers, Frank Staals +1 more | 2022-07-12 |