Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11520239 | Separation of contributions to metrology data | Wim Tjibbo Tel, Frank Staals, Mark John Maslow, Roy ANUNCIADO, Hugo Augustinus Joseph Cramer +2 more | 2022-12-06 |
| 11513442 | Method of determining control parameters of a device manufacturing process | Wim Tjibbo Tel, Mark John Maslow, Koenraad VAN INGEN SCHENAU, Patrick Warnaar, Abraham SLACHTER +3 more | 2022-11-29 |
| 11442367 | Optimizing a sequence of processes for manufacturing of product units | Jochem Sebastiaan Wildenberg, Erik Weber Jensen, Erik Johannes Maria Wallerbos, Cornelis Johannes Rijnierse, Bijoy Rajasekharan +2 more | 2022-09-13 |
| 11443083 | Identification of hot spots or defects by machine learning | Jing Su, Yi Zou, Chenxi Lin, Stefan Hunsche, Yen-Wen Lu +1 more | 2022-09-13 |
| 11314174 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Laurentius Cornelius De Winter, Roland Pieter Stolk, Frank Staals, Anton Bernhard Van Oosten, Paul Christiaan Hinnen +2 more | 2022-04-26 |
| 11300887 | Method to change an etch parameter | Richard Johannes Franciscus Van Haren, Victor Emanuel Calado, Leon Paul VAN DIJK, Roy Werkman, Everhardus Cornelis Mos +4 more | 2022-04-12 |