Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11480884 | Method for optimization of a lithographic process | Everhardus Cornelis Mos, Jochem Sebastiaan Wildenberg, Maurits Van Der Schaar, Frank Staals, Franciscus Hendricus Arnoldus Elich | 2022-10-25 |
| 11442367 | Optimizing a sequence of processes for manufacturing of product units | Jochem Sebastiaan Wildenberg, Marinus Jochemsen, Erik Weber Jensen, Cornelis Johannes Rijnierse, Bijoy Rajasekharan +2 more | 2022-09-13 |
| 11378891 | Method for determining contribution to a fingerprint | Davit Harutyunyan, Fei Jia, Frank Staals, Fuming Wang, Hugo Thomas Looijestijn +8 more | 2022-07-05 |
| 11327407 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more | 2022-05-10 |