Issued Patents 2022
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11480884 | Method for optimization of a lithographic process | Everhardus Cornelis Mos, Erik Johannes Maria Wallerbos, Maurits Van Der Schaar, Frank Staals, Franciscus Hendricus Arnoldus Elich | 2022-10-25 |
| 11442367 | Optimizing a sequence of processes for manufacturing of product units | Marinus Jochemsen, Erik Weber Jensen, Erik Johannes Maria Wallerbos, Cornelis Johannes Rijnierse, Bijoy Rajasekharan +2 more | 2022-09-13 |
| 11435673 | Method of determining a set of metrology points on a substrate, associated apparatus and computer program | Kevin VAN DE RUIT, Roy Werkman | 2022-09-06 |
| 11385550 | Methods and apparatus for obtaining diagnostic information relating to an industrial process | Alexander Ypma, Jasper Menger, David Deckers, David Han, Adrianus Cornelis Matheus Koopman +3 more | 2022-07-12 |
| 11378891 | Method for determining contribution to a fingerprint | Davit Harutyunyan, Fei Jia, Frank Staals, Fuming Wang, Hugo Thomas Looijestijn +8 more | 2022-07-05 |
| 11327406 | Estimating a parameter of a substrate | Svetla Petrova Matova, Roy Werkman, Luc Roumen | 2022-05-10 |
| 11300887 | Method to change an etch parameter | Richard Johannes Franciscus Van Haren, Victor Emanuel Calado, Leon Paul VAN DIJK, Roy Werkman, Everhardus Cornelis Mos +4 more | 2022-04-12 |
| 11294289 | Selecting a set of locations associated with a measurement or feature on a substrate | Pierluigi FRISCO, Svetla Petrova Matova | 2022-04-05 |