Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11520238 | Optimizing an apparatus for multi-stage processing of product units | Jelle Nije, Dimitra GKOROU, Georgios TSIROGIANNIS, Robert Jan Van Wijk, Tzu-Chao CHEN +3 more | 2022-12-06 |
| 11385550 | Methods and apparatus for obtaining diagnostic information relating to an industrial process | Jasper Menger, David Deckers, David Han, Adrianus Cornelis Matheus Koopman, Irina Lyulina +3 more | 2022-07-12 |
| 11327407 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Weitian Kou, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer, Erik Johannes Maria Wallerbos +8 more | 2022-05-10 |
| 11320743 | Method to label substrates based on process parameters | Vahid BASTANI | 2022-05-03 |