Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11460782 | Matching pupil determination | — | 2022-10-04 |
| 11314174 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Laurentius Cornelius De Winter, Roland Pieter Stolk, Frank Staals, Paul Christiaan Hinnen, Marinus Jochemsen +2 more | 2022-04-26 |
| 11287748 | Guided patterning device inspection | Vidya Vaenkatesan, James Wiley, Reinder Teun Plug | 2022-03-29 |